Liquid Particle Counter – Inline System


Liquid-borne particle counters are used for the monitoring and control of particles in pure water and chemical fluids in the semiconductor, electronics, filtration, precision parts, and pharmaceutical industries to ensure quality and profitability. 

RION particle counters can measure size and count of particles in a wide range of liquids such as ultrapure water (UPW), plating solutions, acids, HF, corrosives, alkalines, organic solvents, specialty blends, photo-chemicals, and even polymeric materials.  RION’s superior hardware technology and design offers high detection efficiency (accuracy, repeatability, and reliability), harsh chemical compatibility (wetted parts are PFA and glass or sapphire), and the capability to measure the widest range of chemicals (refractive index) on a single unit.         

The inline (online) configuration allows direct and real-time monitoring of bulk materials and process changes. Visibility of the filtration progress enables shortened process time, point-of-fill particle verification minimizes batch failures and time consuming reworks, continuous supply quality monitoring allows early actions be taken during excursions to prevent expensive defects; all of which reduces costs and time.  

RION offers budget-friendly inline only models and innovative modular design on the KS series particle counters capable of both inline/online and batch sampling. Please contact our representatives to see how RION and MGN can support your needs.


KL-30A UPW Particle Counter

  • For Ultra Pure Water applications
  • Minimum Detectable Particle Size – 0.05um
  • Counting Efficiency – 10% ± 3%
  • Wetted Parts – Synthetic quartz, fluorocarbon rubber, fluoroplastic, PVC, SUS304/316, Pyrex glass, POM

KL-30B UPW Particle Counter

  • For Ultra Pure Water applications
  • Minimum Detectable Particle Size – 0.05um
  • Counting Efficiency – 1% ± 0.3%
  • Wetted Parts – Synthetic quartz, fluorocarbon rubber, fluoroplastic, PVC, SUS304/316, Pyrex glass, POM

Particle Sensor KS-16(F)

  • For UPW and Chemicals (KS-16) & Compatible to HF(KS-16F)
  • Minimum Detectable Particle Size – 0.1um
  • Counting Efficiency – 70% ± 15% / 60% ± 15%
  • Wetted Parts – Synthetic Quartz and PFA / Sapphire and PFA
  • Inline measurement: high detection efficiency

Particle Sensor KL-28(B/BF)

  • For UPW and Chemicals (KS-28B) & Compatible to HF(KS-28BF)
  • Minimum Detectable Particle Size – 0.2um
  • Counting Efficiency – 70% – 110%(Volumetric)
  • 2 Channels – ≥0.2um , ≥0.5um
  • Wetted Parts – Synthetic Quartz, PTFE and PFA / Sapphire, PTFE and PFA

Particle Sensor KS Series

  • For UPW and Chemicals
  • Various models available, as low as 0.03um
  • Counting Efficiency based on model
  • Wetted Parts – PFA and Synthetic Quartz/Sapphire
  • Inline and batch capable