Concentration Meters

FUJI Concentration Meter for CMP (H2O2)
  • Applications: CMP Concentration, H2O2 (oxidizer) concentration in CMP
  • Real Time: On-line, output every 0.6sec
  • Easily Integrated: Ideal for existing or new CMP Delivery Systems

PDF Specs Document

FUJI Concentration Meter for Chemical Delivery Systems
  • Applications: Any Chemistry HF, TMAH, KOH, NH4OH, H3PO4, etc.
  • Real Time: Online output every 0.6sec
  • Easy Integration: Ideal For CDS (Chemical Delivery Systems)

PDF Spec Document

FUJI M52 Concentration Meter for two components
  • Common Applications: TMAH + Si, TMAH + Resist, Slurry + H2O2, HF + H2SiF6 , HF + NH4F, NaOH + IPA
  • Real Time: Online Output every 0.6sec
  • Easy Integration: Multiple Outputs to adapt to any New or Existing System

PDF Spec Document