Liquid Particle Counters

Clean environment control requirements originally were focused mainly on the absence of dust particles in the air. Recently, requirements have been extended to encompass liquids that come into direct contact with the work and liquids used in wet processes, as well as to purity levels that exist in material gases and in the semiconductor manufacturing equipment itself. In the area of pharmaceutics where critical substances are being manufactured,  the control of particles in liquid has always been an important consideration.

Aviation and space exploration, heavy machinery, and automobile manufacturing are other fields where particle control in hydraulic systems plays an important role.
Coupled with the impressive progress in electronics, mechatronics, and biotechnology, the quality of water, solvents and other chemicals used for cleaning, diluting, and chemical reactions is an essential consideration.

Even beyond the fields mentioned above, the realization is spreading that precise and reliable purity control is important for maintaining product quality and increasing yield. The emphasis in the industry is shifting from the old “cleaning yes-measurement no” to the new principle “always measure both before and after cleaning.”

With high detection efficiency, Rion’s laser liquid-borne particle counting system uses highly reliable, long life laser diodes, and technologically superior photo-detector & flow cell. All Rion systems are user friendly, versatile and simple operation for in-situ and batch modes. All system are equipped with standard RS-232-C interface port for computer operation, and are compatible with all liquids from water to strong acids.

 

Liquid Particle Counter – Batch System

 

Particle Sensor KS-19F (HF compatible)

Controller KS-19F

For Chemicals including HF 0.03um

  • Minimum Detectable Particle Size – 0.03um
  • Sensor Flow Rate – 10 ml/min
  • Flow Cell Type – Sapphire
  • Counting Efficiency – 5 % ± 1.5 %
  • Wetted Parts – Sapphire and PFA
  • 10 user selectable particle size channels from 0.03um to 0.13 um.
  • With abundant options, it can be used for both in-line and off-line measurement
  • Note* – This unit can be installed in Batch or Inline Configuration.

PDF Spec Document

Particle Sensor KS-18F (HF compatible)

For UPW or Chemicals including HF

  • Minimum Detectable Particle Size – 0.05um
  • Sensor Flow Rate – 10 ml/min
  • Flow Cell Type – Sapphire
  • Counting Efficiency – 10 % ± 3 %
  • Wetted Parts – Sapphire and PFA
  • 10 user – selectable particle size channels from 0.05um to 0.2 um.
  • Versatile system: Inline or Batch (from a container) measurement
  • Small footprint: Ideal for OEM or integration  as well as Lab Applications
  • Note* – This unit can be installed in Batch or Inline Configuration.

PDF Spec Document

Particle Sensor KS-41B

Particle Sensor KS-41B

For Photoresist, SOG, ARC, and other high noise materials

  • Minimum Detectable Particle Size – 0.1um
  • Sensor Flow Rate – 5 ml/min
  • Flow Cell Type – Synthetic Quartz
  • Counting Efficiency – 50 % ± 10 %
  • Wetted Parts – Synthetic quartz and PFA
  • Can be connected to the multiple monitoring system
  • Optimized RION noise reduction technology
  • Optional dynamic range upgrade (0.07-0.5um)
  • Industry Standard for ArF and Immersion resist, SOG/SOC, ARC, other polymeric materials
  • Note* – This unit can be installed in Batch or Inline Configuration

PDF Spec Document

Particle Sensor KS-41A

For Photoresist, SOG, ARC, and other high noise materials

  • Minimum Detectable Particle Size – 0.15um
  • Sensor Flow Rate – 10 ml/min
  • Flow Cell Type – Synthetic Quartz
  • Counting Efficiency – 50 % ± 10 %
  • Wetted Parts – Synthetic quartz and PFA
  • Revolutionary detection system: Only particle sensor to measure resist below 0.2um accurately
  • Built in PHA and selectable channels: Allows for proper products characterization
  • Industry standard: for High Noise Material Measurement
  • Note* – This unit can be installed in Batch or Inline Configuration

PDF Spec Document

Particle Sensor KS-42A(F)

For UPW and Chemicals (KS-42A) & Compatible to HF(KS-42AF)

  • Minimum Detectable Particle Size – 0.1um
  • Sensor Flow Rate – 10 ml/min
  • Flow Cell Type – KS-42A – Synthetic Quartz / KS-42AF – Sapphire
  • Counting Efficiency – 70 % ± 15 % / 60 % ± 15 %
  • Wetted Parts – Synthetic Quartz and PFA / Sapphire and PFA
  • 10 user – selectable channels between 0.1-1.0 micron
  • Versatile System: Inline or Batch (from a container) measurement
  • Note* – This unit can be installed in Batch or Inline Configuration.

PDF Spec Document

Particle Sensor KS-42B(F)

For UPW and Chemicals (KS-42B) & Compatible to HF(KS-42BF)

  • Minimum Detectable Particle Size – 0.2um
  • Sensor Flow Rate – 10 ml/min
  • Flow Cell Type – KS-42B – Synthetic Quartz / KS-42BF – Sapphire
  • Counting Efficiency – 70% – 110%(Volumetric)
  • Wetted Parts – Synthetic Quartz and PFA / Sapphire and PFA
  • 10 user – selectable channels between 0.2-2 micron
  • Versatile System: Inline or Batch (from a container) measurement
  • Note* – This unit can be installed in Batch or Inline Configuration

PDF Spec Document

Particle Sensor KS-42C

For UPW or Chemicals

  • Minimum Detectable Particle Size – 0.5um
  • Sensor Flow Rate – 10 ml/min
  • Flow Cell Type – KS-42C – Synthetic Quartz
  • Counting Efficiency – 70% – 110%(Volumetric)
  • Wetted Parts – Synthetic Quartz, PTFE and PFA
  • 10 user – selectable channels between 0.5-20 micron
  • Compact design: Ideal for OEM and Facility / Tool Monitoring Applications
  • Versatile System: Inline or Batch operation
  • Small footprint: Ideal for Labratory Use
  • Note* – This unit can be installed in Batch or Inline Configuration.

PDF Spec Document

Particle Sensor KS-42D

For UPW or Chemicals

  • Minimum Detectable Particle Size – 2.0um
  • Sensor Flow Rate – 25 ml/min
  • Flow Cell Type – KS-42D – Synthetic Quartz
  • Counting Efficiency – 100 % ± 20 %
  • Wetted Parts – Synthetic Quartz, Perfluoro and PFA
  • 10 user – selectable channels between 2.0-100 micron
  • Versatile System: Inline or Batch operation
  • Note* – This unit can be installed in Batch or Inline Configuration.

PDF Spec Document

 

Batch System Accessories

 

Pulse Height Analyzer KF-50A
  • Pulse Height Analyzer KF-50AWindows Software: Windows XP SP2 or later
  • Uses: displays results of Pulse Height Analysis performed by the particle counter
  • Security: HASP License key (1 ea supplied)
  • File: Easy file save and transfer, copy and paste
  • Displays results of pulse height analysis as performed in particle counter
  • Automatically calculates particle sizes from Voltage Values for display
  • Suitable for noise check of samples with noise rise such as photoresist
  • Ideal for maintenance purposes and for assuring particle counter classification accuracy
  • Particle distribution data can be used to test particle generator stability

PDF Spec Documents

Controller KE-40B1

Controller for RION Particle Counters

  • LCD Touch Screen
  • Up to 10 selectable channels
  • Built in memory and CF card slot
  • Built in printer
  • User friendly: One touch operation for measure, purge, and combination modes (with KZ-31W & KZ-30W2 sampler)
Syringe Sampler KZ-31W

Supported Controllers for Connection – KE-40B1, KE-40B and KE-40

  • Dimensions: 141 (W) X 215 (D) X 345(H) mm
  • Weight: Approx. 5.5 kg
  • Choice of three operation modes: purge mode, measurement mode, and combination mode for preset sequence of purge and measurement operations.
  • Large display allows checking current status at a glance.
  • Application software allows management of all settings from a computer.
  • Memory for up to 50 sets of parameter settings for purge mode or measurement mode.
  • Selectable blank volume lets sample fluid flow rate stabilize after start of plunger action.
  • Syringe set with integrated valve for easy replacement.
  • Automatic syringe capacity detection.

PDF Spec Document

External Pressure Sampler KZ-30U/KZ-28M
  • For connection to any RION batch type particle counting system and in conjunction with RION KZ-31W Syringe sampler to achieve measurable flow for highly viscous materials.
  • The simple chemical-proof sampler, KZ-30U is designed to pressurize and supply sample fluid to the particle counters for off-line measurement.
  • Easy-to-operate chemical resistance sampler with chamber.
  • Controlled with Pressure control unit.

 

Liquid Particle Counter – Inline System

 

KL-30A UPW Particle Counter

For Ultra Pure Water applications

  • Minimum Detectable Particle Size – 0.05um
  • Sensor Flow Rate – 20 ml/min
  • Flow Cell Type – Synthetic Quartz
  • Counting Efficiency – 10 % ± 3 %
  • Wetted Parts – Synthetic quartz, fluorocarbon rubber, fluoroplastic,
    PFA, PVC, SUS304/316, Pyrex, POM
  • In-line Measurement

PDF Spec Document

KL-30B UPW Particle Counter

For Ultra Pure Water applications

  • Minimum Detectable Particle Size – 0.05um
  • Sensor Flow Rate – 10 ml/min
  • Flow Cell Type – Synthetic Quartz
  • Counting Efficiency – 1 % ± 0.3 %
  • Wetted Parts – Synthetic quartz, fluorocarbon rubber, fluoroplastic, PVC, SUS304/316, Pyrex glass, POM
  • In-line measurement

PDF Spec Document

Particle Sensor KS-16(F)

For UPW and Chemicals (KS-16) & Compatible to HF(KS-16F)

  • Minimum Detectable Particle Size – 0.1um
  • Sensor Flow Rate – 10 ml/min
  • Flow Cell Type – KS-16 – Synthetic Quartz / KS-16F – Sapphire
  • Counting Efficiency – 70 % ± 15 % / 60 % ± 15 %
  • Wetted Parts – Synthetic Quartz and PFA / Sapphire and PFA
  • Inline measurement: high detection efficiency
  • Small Footprint: Ideal for OEM and integration applications

PDF Spec Document

Particle Sensor KL-28(B/BF)

For UPW and Chemicals (KS-28B) & Compatible to HF(KS-28BF)

  • Minimum Detectable Particle Size – 0.2um
  • Sensor Flow Rate – 10 ml/min
  • Flow Cell Type – KS-28B – Synthetic Quartz / KS-28BF – Sapphire
  • Counting Efficiency – 70% – 110%(Volumetric)
  • Wetted Parts – Synthetic Quartz, PTFE and PFA / Sapphire, PTFE and PFA
  • 2 Channels – ≥0.2um , ≥0.5um
  • Compact design: Ideal for OEM and Facility / Tool Monitoring Applications

PDF Spec Document

 

Inline System Accessories

 

RP Monitor EVO K0505(Ver.3)
  • Operating system: Microsoft Windows XP, 7 (32bit)
  • Interface: RS-232C
  • Sensor: Equal number as serial COM ports (up to 32)
  • Air:
    KA-80B, KA-82, KR-02C, KR-03, KC-24, KM-27 (manifold system)
    Liquid:
    KS-16/16F, KS-17B, KZ-51K, L-28B/28BF (option board required)
  • This software will allow you to control particle counters for automatic operation, data collection, data display, filing and printing.
  • TreeView is used for easy operation, settings for measurement point and conditions.
  • Controls particle counters in serial mode and up to 32 points in multiple points(R) mode simultaneously.

PDF Spec Document

RP Monitor EVO K0505(Ver.2)
  • Operating system: Microsoft Windows XP, 7 (32bit)
  • Interface: RS-232C
  • Sensor: Equal number as serial COM ports (up to 8)
  • Connectable Sensor Air:
    KC-01E, KC-03B, KC-20A, KC-22A/22B, KC-52
    Connectable Sensor Liquid:
    KS-16/16F, KS-17A/17B, KL-28B/28BF, KE-40B1
  • This software will allow you to control particle counters for automatic operation, data collection, data display, filing and printing.
  • TreeView is used for easy operation, settings for measurement point and conditions.
  • Control up to 8ports/8particle counters in serial communication mode.

PDF Spec Document

Controller KE-40B1

Controller for RION Particle Counters

  • LCD Touch Screen
  • Up to 10 selectable channels
  • Built in memory and CF card slot
  • Built in printer
  • User friendly: One touch operation for measure, purge, and combination modes (with KZ-31W & KZ-30W2 sampler)
K9904A Bellows Sampler
  • Supply sample fluid to particle counters without fluid leaks or contamination.
  • Dimensions: 230 (W) X 150 (D) X 105(H) mm
  • Weight: Approx. 2 kg
  • Fluid Viscosity – 30mPa・s (with 10mL/min)
  • Maximum Discharge volume – 15mL/stroke
  • External Pressure – 300kPa
Mass Flow Controller CVR1/4-FM

Flow controller for in line measurement

  • CVR-PVC and CVR-1/4-FM are flow controllers for Liquid-borne particle counter. They are located downstream of the counter in pressure line.
  • (This Mass Flow Controller is products of Surpass Industry Co.,Ltd.)
  • Compatible Fluids – Pure water, chemical fluids
  • Adjustable Flow – 10 to 31.2mL/min
  • Pressure Used – 100kPa to 400kPa
  • Approx. 125 (H) × 185 (W) × 110 (D) mm

 

Liquid Particle Counter – Pharmaceutical System

 

Particle Counter KL-05

For Pharmaceutical applications USP <788>

  • Minimum Detectable Particle Size – 1.3um
  • Sensor Flow Rate –

25 mL syringe:25 mL/min
10 mL syringe:10 mL/min*Factory option

  • Counting Efficiency – 100 % ± 5 %
  • Wetted Parts –

Flow cell : Synthetic quartz
Syringe : Borosilicate glass, PTFE
Syringe pump : Kel-F (PCTFE), PTFE
Tube, packing, joint : PFA, PTFE, PCTFE, Perflo (special fluorine rubber)

  • Compliant with insoluble particulate matter testing for injections in accordance with the Japanese Pharmacopeia (JP), United States Pharmacopeia (USP),European Pharmacopeia (EP), Korean Pharmacopeia (KP) and Chinese Pharmacopoeia (ChP).
  • Supports small volume measurement (USP 787). Special small size sample stand available as option, for 10 mL syringes and ampoules etc.
  • Compliant with FDA’s 21 CFR Part 11. Comprehensive operator and password management functions, as well as electronic signature support.
  • Serial communication function allows output of measurement data to a Laboratory Information Management Systems (LIMS) etc.
  • Measurement results can be output as PDF or text file (tab delimited) format.
  • Large 10.4 inch LCD panel provides information in an easy to read format.
  • Integrated SSD storage improves data access speed.
  • Measurable particle size range 1.3 μm to 100 μm, flow rate 25 mL/min (10 mL/min available as factory option),with up to 20 particle size range settings.

PDF Spec Document