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Technical Info

We host an extensive list of technical papers related to contamination monitoring and control.

These technical papers have been written and presented at international conventions by people who have vast knowledge of the contamination control industry.

We invite you to review these technical papers.


RION Published Papers

  • Measurement and Control of Liquid-borne Particles in the Semiconductor Manufacturing Process 

  • Latest Technology and Standardization Trends for Liquid Particle Counters 

  • Particle Measurement and Particle Counters Part 1 

  • Particle Measurement and Particle Counters Part 2

MGN Published Papers

  • Correlation of Particle Counters Abstract-MGN

  • Correlating Particle Counter Data Between Different Instruments

Customer Published Papers

  • Measurement of Nanoparticles on Parts: Figures of Merit of a Liquid-borne Particle Counter

  • Test Method for Particle Removal Performance of Liquid Filter Rated 20 – 50 nm with Liquid-Borne Particle Counter

  • Development of an Automatic Sampling Module to Monitor Concentration of Liquid-Borne Nanoparticles

  • Advanced lithographic filtration and contamination control for 14nm node and beyond semiconductor processes

  • Particle reduction in high-temperature sulfuric acid using PTFE membrane filter and low pulsation bellows pump

  • Confidence in Evaluation of High Purity of Samples
  • Chemical and Supplier Management : Do’s and Don’ts
  • Particle Control

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