SEMI Fab Front-End

We are experienced in supporting Fabs of all sizes and applications to monitor and manage yield-affecting contaminations. Our fast response, localized on-site services, and unlimited support compliments the products we offer into a comprehensive solution to meet your requirements.

Liquid Particle Counting

Batch Applications : gate and measure quality of chemical deliveries to protect bulk chemical tanks, reduce filtration burden, prevent excursions
Inline Applications : filtration and final polishing monitoring, Particle Defense Line, bulk chemical delivery monitoring, new filter flushing checks, and UPW monitoring
Chemical Compatibility : PFA and glass/sapphire wetted parts ensures resistance and compatibility with UPW, aqueous, solvents, blends, acids, HF, bases, and corrosives.
Cost Effectiveness : able to measure a wider range of refractive indexes and chemicals than competitor units, modular design enables each switch between batch and inline
RION’s superior counting efficiency measures more of the liquid passing through the sensor to allow detection of small fluctuations and more stable data trends

Air Particle Counting

Handheld / Portable : particle source detection, clean-room qualifications, spot checks, move and measure
Multi-point / Manifold : continuous monitoring of production / filling area cleanliness, 0.08um and 0.10um capable, sampling tubes enables connection to tools and enclosed spaces
Capabilities: 0.08um and 0.10um capable
ISO 21502 (JIS B 9921): high flow-rate and high counting efficiency

Ultrasonic Concentration Meters

Applications : feed chemical monitoring, chemical blending, quality control
Fast : real-time measurement, no more waiting for lengthy titration
Accurate : superior to conductivity meters, temperature compensating
Flexibility : flow-cell type, flanged type, and explosion proof models
Easy to Maintain : no consumables, self calibration / verification

Portable Cleanzone System

ISO Class 1 capable : less than 10 particles/m3 at 0.1um
Fast : establishes a clean-zone in less than 3 minutes (Turn off when not in use)
Portable : plug-n-play, standard electric outlet
Cost Effective : lower initial cost AND operating cost than standard traditional clean-room
Applications : Ultra-clean protection of sensitive test samples, critical processes, and instruments. Localized filtration of particle generating spots

Litho, Etch, PVD Tool Cleaning – CCW

- Chuck Cleaning Wafers enable online cleaning to eliminate lengthy tool downtime and associated costs
- Eliminate ESC flow faults without opening the chamber
- Eliminate Lithography Hot Spots with No Downtime
- Eliminate PVD backside pressure faults without opening the chamber

US PHONE: 1-800-976-1649

MGN Service Center

41665 Date St
Suite 100
Murrieta, CA, 92562
T: 1-800-976-1649

Northwest

15838 SW Upper Boones Ferry Road
Lake Oswego, OR, 97035
T: 503-995-028

Southwest

3100 W Ray Rd
Suite 201
Chandler, AZ, 85226
T: 480-909-8576

Central

2105 E Martin Luther King Blvd
Office 217
Austin, TX, 78702
T: 512-368-0858

East

Greater Boston, MA
T: 508-308-7985