Liquid Particle Counter – Batch System


Liquid-borne particle counters are used for the monitoring and control of particles in pure water and chemical fluids in the semiconductor, electronics, filtration, precision parts, and pharmaceutical industries to ensure quality and profitability. 

RION particle counters can measure size and count of particles in a wide range of liquids such as ultrapure water (UPW), plating solutions, acids, HF, corrosives, alkalines, organic solvents, specialty blends, photo-chemicals, and even polymeric materials.  RION’s superior hardware technology and design offers high detection efficiency (accuracy, repeatability, and reliability), harsh chemical compatibility (wetted parts are PFA and glass or sapphire), and the capability to measure the widest range of chemicals (refractive index) on a single unit.         

The batch configuration allows user-friendly, automated sampling from containers of all sizes and shapes such as vials, beakers, bottles, drums, totes, baths, and tanks.  This configuration enables quality analysis and reporting of incoming materials, limited R&D samples, and final packaged products.  

RION’s innovative modular design on the KS series particle counter enables the system to be configured for both inline/online and batch sampling, giving the user maximum operational flexibility and cost savings. Please contact our representatives to see how RION and MGN can support your needs.


Particle Sensor KS-19F (HF compatible)

  • For Chemicals including HF
  • Minimum Detectable Particle Size – 0.03um
  • Counting Efficiency – 5% ± 1.5%
  • Versatile system: Inline or Batch (from a container) measurement

Particle Sensor KS-18F (HF compatible)

  • For UPW or Chemicals including HF
  • Minimum Detectable Particle Size – 0.05um
  • Counting Efficiency – 10% ± 3%
  • Versatile system: Inline or Batch (from a container) measurement

Particle Sensor KS-41B

  • For Photoresist, SOG, ARC, and other high noise materials
  • Minimum Detectable Particle Size – 0.1um
  • Optional dynamic range upgrade (0.07-0.5um)
  • Counting Efficiency- 50% ± 10%
  • Versatile system: Inline or Batch (from a container) measurement

Particle Sensor KS-41A

  • For Photoresist, SOG, ARC, and other high noise materials
  • Minimum Detectable Particle Size – 0.15um
  • Counting Efficiency- 50% ± 10%
  • Versatile system: Inline or Batch (from a container) measurement

Particle Sensor KS-42A(F)

  • For UPW and Chemicals (KS-42A) & Compatible to HF(KS-42AF)
  • Minimum Detectable Particle Size – 0.1um
  • Counting Efficiency – 70% ± 15% / 60% ± 15%
  • Versatile System: Inline or Batch (from a container) measurement

Particle Sensor KS-42B(F)

  • For UPW and Chemicals (KS-42B) & Compatible to HF(KS-42BF)
  • Minimum Detectable Particle Size – 0.2um
  • Counting Efficiency – 70% – 110%(Volumetric)
  • Versatile System: Inline or Batch (from a container) measurement

Particle Sensor KS-42C

  • For UPW or Chemicals
  • Minimum Detectable Particle Size – 0.5um
  • Counting Efficiency – 70% – 110%(Volumetric)
  • Versatile System: Inline or Batch operation

Particle Sensor KS-42D

  • For UPW or Chemicals
  • Minimum Detectable Particle Size – 2.0um
  • Counting Efficiency – 100% ± 20%
  • Versatile System: Inline or Batch operation

Particle Counter KL-05

  • For Pharmaceutical applications USP <788>
  • Minimum Detectable Particle Size – 1.3um
  • Counting Efficiency – 100% ± 5%
  • Supports small volume measurement (USP 787)
  • Compliant with FDA’s 21 CFR Part 11