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FUJI Concentration Meter for CMP (H2O2)
- Applications: CMP Concentration, H2O2 (oxidizer) concentration in CMP
- Real-Time: On-line, output every 0.6 sec
- Easily Integrated: Ideal for existing or new CMP Delivery Systems
FUJI M13 Concentration Meter for Chemical Delivery Systems
- Applications: Any Chemistry HF, TMAH, KOH, NH4OH, H3PO4, etc.
- Real-Time: Online output every 0.6 sec
- Easy Integration: Ideal For CDS (Chemical Delivery Systems)
FUJI M53 Concentration Meter for two components
- Common Applications: TMAH + Si, TMAH + Resist, Slurry + H2O2, HF + H2SiF6 , HF + NH4F, NaOH + IPA
- Real Time: Online Output every 0.6 sec
- Easy Integration: Multiple Outputs to adapt to any New or Existing System
