Contamination monitoring and control is still important at the back-end of the semiconductor manufacturing. Prevention and removal of contaminants from the process and testing tools are critical to improve yield and maintain high quality and profitability.
Probe Card Clean
- Improve yield
- Easier and less downtime than manual cleaning
- We offer both Mipox and ITS brand products with a wide variety of structures, shapes, sizes, loading, abrasive size, and aggressiveness.
- Cleaning wafers, chucks, self-application sheets for both online and offline needs
Probe Card Conditioning
- Clean and reconditions probe tips to extend functional life
- Maintain tip shape for proper contact and oxide penetration
- Products include Probe Form, Probe Refresh, SWE, LCxK
- Customized solutions available
Test Contactor Cleaning
- Improve yield
- Easier and less downtime than manual cleaning
- ITS surrogate chips offer fast and automated online cleaning process
- Mipox low cost solutions for offline cleaning
Portable Cleanzone System
- ISO Class 1 capable: less than 10 particles/m3 at 0.1um
- Fast: establishes a clean-zone in less than 3 minutes (Turn off when not in use)
- Portable: plug-n-play, standard electric outlet
- Cost Effective: lower initial cost AND operating cost than standard traditional clean-room
- Applications: Ultra-clean protection of sensitive test samples, critical processes, and instruments. Localized filtration of particle generating spots
Air Particle Counting
- Handheld / Portable : HDD particle generation test, particle source detection, clean-room qualifications, spot checks, move and measure
- Multipoint / Manifold : continuous monitoring of production / filling area cleanliness, capable down to ≥0.08um and up to ≥100.0um, sampling tubes enables connection to tools and enclosed spaces
- Various flow-rates available to meet application requirements